反应离子镀光学薄膜的牢固度和表面粗糙度分析

Abrasion Resistance and Surface Roughness of Optical Coatings by Reactive Ion Plating

本文对反应离子镀和反应蒸发(电子束蒸发)工艺制备的光学薄膜的牢固度和表面粗糙度进行了检测,并将结果进行对比。

We measured the abrasion resistance and surface roughness of optical coatings by reactive ion plating deposition and reactive evaporation (electron beam evaporation ). The results have been carefully compared.