摘要
在不同预处理条件的不锈钢衬底上 ,利用微波等离子体化学气相沉积 (MWPCVD)方法从甲烷和氢气的混合气体中沉积碳纳米管薄膜 ,并对其场发射性能进行了研究 .实验发现 ,不锈钢衬底的机械抛光和酸洗 ,能降低碳纳米管膜的开启场强 ,增大它的发射电流密度 .在场强为 6 .2 5 V/μm时 ,衬底未处理样品的电流密度为 1.2 m A / cm2 ,而衬底抛光的样品和衬底抛光又酸洗的样品的电流密度分别达到 3.2和 2 .75 m A / cm2 .衬底只需机械抛光 ,而不需要酸洗 。
Carbon nanotubes (CNTs) are synthesized from methane and hydrogen gas mixture directly on stainless steel plates by microwave plasma chemical vapor deposition (MWPCVD).By varying pretreatment conditions of the substrates such as mechanically polishing and acid washing,it is found the polishing and acid washing can lower the turn-on field and improve the emission current density.The current density of the un-pretreated sample attains 1.2mA/cm 2,but the polished sample and polished acidly washed sample attain 3.2 and 2.75mA/cm 2,respectively,at the electric field of 6.25V/μm.
