基于自会聚多光束阵列的薄膜应力传感器

A Kind of Thin-Film Stress Sensor Based on Beam-Focusing Multi-Beam Array

介绍了一种通过分析二元光束阵列的反射光图像 ,利用 Stoney方程解算出薄膜应力的在线测量传感器 .传感器是以二维 Damm ann光栅和 Fresnel波带板所组成的集成二元光学分束器为核心设计的 .该传感器可进行各种单晶、多晶和非晶结构材料沉积过程的现场应力测量 ,灵敏度优于 2 .5× 10 6 Pa,精度优于 4 .2 7% .它具有结构简单、测量速度快、适应性强、设备集成度高而且易于安装调试等特点 .与计算机自动控制系统相结合 。

A new sensor measuring in real time is introduced,which is based on the analysis of the reflected light images of the binary optical array and the solution of Stoney equation.The sensor is designed with the core of a binary optical splitter,which is made up of a two-dimension Dammann grating and a Fresnel zone plate.With the sensitivity over 2.5×10 6Pa and precision over 4.27%,it can be used in the in-situ stress measurement of the materials with structures such as single-crystal,multi-crystal,or non-crystal in their deposition process.Also it has advantages of simple structure,high speed,powerful adaptability,high integration,and easy fitting.Combined with the computer automatic control system,the sensor can be used in the measurement and control of thin-film growth in the product line of semiconductor integrated circuits.