铜离子交换单步掩埋BK7玻璃波导的制备与表征

Characterization of Single Step Buried Waveguides on BK7 Glass by Copper Ion Exchange

利用Cu离子交换技术制备了BK7玻璃平面光波导,在6328nm波长下,用棱镜耦合技术测量出所制备波导的有效折射率,利用反WKB方法计算并确定了平面光波导的折射率分布,通过对折射率分布进行函数拟合,发现离子交换后的样品折射率分布近似符合改进后的高斯分布,样品的折射率分布似乎是一个掩埋波导的折射率分布,求出所制备玻璃平面光波导在570℃的扩散系数De≈12133×10-14m2s。同时,对所制备波导进行了电子显微镜(EMS)和次级离子质谱(SIMS)测试,得到了铜离子在玻璃表面的浓度分布,从而证明了实验所得到的BK7玻璃平面光波导是掩埋波导。这种掩埋平面波导是由单步Cu离子交换技术得到的。

Planar optical waveguides were fabricated by copper ion exchange on BK7 glass substrate. The effective refractive index was measured by prism coupling technique at the wavelength of 632.8 nm. Refractive index profile was determined by Inverse WKB method. The results showed that the best fitting to the index profile was improved Gauss function, and the index profile appeared to be a buried waveguide′s index profile. The diffused coefficient of copper ion exchange at 570℃ was obtained as D e≈1 2133×10 -14 m 2/s. At the same time, the BK7 ion exchanged glass samples were determined by electron microscope scan (EMS) and secondary ion mass spectroscopy (SIMS) measurements, the copper ions concentration in the BK7 glass waveguides′ surface was gotten. It could be shown that the BK7 glass planar waveguides were buried waveguides. The fabricated BK7 buried glass was obtained by single step copper ion exechange.