十字光栅多普勒效应二维测量系统的研究

Study on a 2-D Measurement System Using Cross Grating Doppler Effect

提出一种利用十字光栅衍射的多普勒效应进行二维位移测量的新方法。给出了以二维全息光栅为多普勒频移发生器、以矩形槽相位光栅为混频器的光路结构和测量原理。理论计算和实验表明,此系统具有良好的信号质量和较高的测量精确度,奇用于生产环境中的两坐标精密检测。

-This paper offers a new 2-D measuring method in which the displacement of a body can be measured by using the cross grating Doppler effect. The measuring principle of the system, the diffraction fringes of cross holographic grating and the phase relationship between the received beat signals using laminar diffraction grating are analyzed theoretically. The results of experiments show that this system gives high quality signals with high measuring accuracy and can be easily used in the practice.