压电陶瓷在叠加式力标准机上的应用研究

The Application Study of Piezoelectric Ceramics on Overlap-type Force Standard Machine

指出了叠加式力标准机力源施力精度和力值维持时问取决于它所能实现的最小位移量及其控制精度。提出并建立了利用“逆压电效应”原理产生可控制的精密变形,直接作用于力源的传力系统中调节力值的理论和方法。使用压电陶瓷材料研制了施力装置及其控制器,并进行了实验研究。理论分析和实验结果表明,用压电陶瓷材料及其控制技术作叠加式力标准机力值控制装置,使力源具有高精度、高性能、自动化和低成本的特点。

-In this paper, it is pointed out that the accuracy of the force exerted by the force source device of overlap-type force standard machine and the maintaining period of the force value depend on the minimum displacement and the control accuracy which may he realized on the machine. The present force devices restrict the accuracy and performance of force standard machines, because of the natural defects of their structure and working principle. On the basis of analysis on the working principle of overlap-type force standard machine, the authors have proposed and established a theory and a method by making use of the piezoelectric converse effect to produce a controllable precise deformation directly on the transmission system of force standard machine to control the force. A force source device and its corresponding controller have been developed by using piezoelectric ceramics. Theoretical analysis and experimental results have proved that the use of piezoelectric ceramics and its control technique as the force source device and controller of overlap-type force standard machines has made the force source to get the advantages of high accuracy, good performance, low-cost and automation.