微细图形几何尺寸测量的实验研究

Experimental Study on the Measurement of Micro-dimensional Structure

微细图形的几何尺寸测量是影响大规模集成电路生产效率和质量的重要问题。作者等在DXY-1型线宽轮廓测量仪上对与微细图形几何尺寸测量精度有关的因素进行了实验研究。实验结果表明,该仪器的重复测量精度优于±0.005μm,对比测量偏差△≤0.02μm。

-The measurement of micro-dimensional structure is a key problem which will influences the production efficiency and quality of LSI. With the self-made DXY-1 type linewidth measuring system, the authors hare carried out an experimental study on the factors which may affect the accuracy of the measurement of micro-dimensional structure. The results show that the repeatability of this system is ≤±0.005μm, and the difference between the nominal and the measurand values is ≤±0.2μm.