摘要
A series of samples deposited by VHF-PECVD at different pressures were studied.The measurement results of photosensitivity (photo conductivity/dark conductivity) and activation energy indicated near the same rule with the change of the pressure.The results measured by Raman scattering spectra,X-ray diffraction and FTIR all proved the evident crystallization of the materials.Treating the p/i interface by hydrogen has a great improving effect on the performance of the microcrystalline silicon (μc-Si) p-i-n solar cells if the treatment time was appropriate.An efficiency of 4.24% for μc-Si p-i-n solar cells deposited by VHF-PECVD was firstly obtained.
A series of samples deposited by VHF-PECVD at different pressures were studied.The measurement results of photosensitivity (photo conductivity/dark conductivity) and activation energy indicated near the same rule with the change of the pressure.The results measured by Raman scattering spectra,X-ray diffraction and FTIR all proved the evident crystallization of the materials.Treating the p/i interface by hydrogen has a great improving effect on the performance of the microcrystalline silicon (μc-Si) p-i-n solar cells if the treatment time was appropriate.An efficiency of 4.24% for μc-Si p-i-n solar cells deposited by VHF-PECVD was firstly obtained.
基金
NationalKeyBasicResearchProjectof"973"(G2 0 0 0 0 2 82 0 2
G2 0 0 0 0 2 82 0 3)
KeyProjectofEducationBureau(0 2 1 6 7)
"86 3"ProjectofHigh -resolutionFlatPanelDisplay (2 0 0 2AA30 32 6 1 )
