摘要
The amorphous/polycrystalline Si3N4/CrN nano-structured multilayer films ha ve been prepared by radio frequency (RF) reactive magnetron sputtering. The comp osition,microstructure and mechanical properties of these films were characteri zed by X-ray photoelectron spectroscopy (XPS),X-ray diffraction (XRD),high- resolution transmission electron microscopy (HRTEM) and nano-indentation. The C rN and (Si3N4) single layer films are polycrystalline face centered-cubic and amorphous structures,respectively. The CrN and Si3N4 layers are nearly stoichiometric. The HRTEM image indicates that the interfaces are planar and m odulation structure is clear in multilayers. The hardness values of Si3N4/Cr N multilayers are between those of the constituent CrN and Si3N4 films at a substrate temperature of 20 ℃,and are somewhat higher than those of Si3N4 films at a deposition temperature of 500 ℃. There is no superhardness effect in the Si3N4/CrN multilayers. Based on the experimental results,the hardeni ng mechanisms in the multilayers have been discussed.
The amorphous/polycrystalline Si_3N_4/CrN nano-structured multilayer films ha ve been prepared by radio frequency (RF) reactive magnetron sputtering. The comp osition,microstructure and mechanical properties of these films were characteri zed by X-ray photoelectron spectroscopy (XPS),X-ray diffraction (XRD),high- resolution transmission electron microscopy (HRTEM) and nano-indentation. The C rN and (Si_3N_4) single layer films are polycrystalline face centered-cubic and amorphous structures,respectively. The CrN and Si_3N_4 layers are nearly stoichiometric. The HRTEM image indicates that the interfaces are planar and m odulation structure is clear in multilayers. The hardness values of Si_3N_4/Cr N multilayers are between those of the constituent CrN and Si_3N_4 films at a substrate temperature of 20 ℃,and are somewhat higher than those of Si_3N_4 films at a deposition temperature of 500 ℃. There is no superhardness effect in the Si_3N_4/CrN multilayers. Based on the experimental results,the hardeni ng mechanisms in the multilayers have been discussed.
出处
《中国有色金属学会会刊:英文版》
CSCD
2004年第4期692-696,共5页
Transactions of Nonferrous Metals Society of China