用ECR氮等离子对纳米TiO_2薄膜光谱响应改性的研究

Study on the modification of the nano-TiO_2 film's absorbtion spectrum by the nitrogen ECR plasma

采用ECR氮等离子对纳米TiO2薄膜表面进行氮注入处理来改善纳米TiO2催化剂的光谱响应范围。处理后表面颜色变成微黄色,说明氮离子已注入到TiO2薄膜里;AFM观察处理前后的薄膜,发现表面形貌没有很大改变;紫外-可见光谱分析结果表明,TiO2薄膜催化剂的光谱响应红移了12-18nm;通过不同功率、不同处理时间研究显示,在微波功率为400W、处理60min改性效果最理想。

In order to improve the absorbtion spectrum of nano-TiO2 film, nitrogen ions were implantedinto the nano-TiO2 film by the ECR plasma. The color of modified sample is changed to tint yellow.The AFM images show that the sample's morphology is not defaced before and after treatment. The UV-Vis optical tests show that the absorbtion spectra are moved 12-18nm to the infrared side. Withdifferent power and time, the feasible conditions are determined at 400W, 60 min.