摘要
根据非线性热传导方程,用有限差分方法计算金属中强束流离子注入的温升效应给出了温升和温度分布曲线,以及样品表面温度与离子能量、剂量率、靶座温度。
From solving the nonlinear equation of thermal conduction by using the finitedifference method,the effects of temperature rise in metals during high currention-implantation have been calculated. Curves of temperature rises, curves of profile temper-ature distributions, and dependences of sample surface temperature upon ion energies,doserates, target temperatures, and sample thicknesses are obtained. The processes of temperaturerise in pulsed and scanning ion-implantations are computed as well, and the temperaturefluctuations in them are discussed also.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
1993年第3期B136-B142,共7页
Acta Metallurgica Sinica
基金
国家"863"计划资助项目
关键词
离子注入
数值计算
碳素钢
工具钢
steel TBA
ion-implantation
non-linear thermal conduction
numerical calculation