期刊文献+

超高真空电子束蒸发系统ULS400的技术改造及新应用

Improvements of ultrahigh vacuum electron beam evaporation system and its new apolications in nanotechnology
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摘要 本文主要介绍安装在超高真空电子束蒸发系统ULS4 0 0中———自行设计、研制的恒温控制系统以及它在纳米科技领域发挥出的新作用 :制备多种特殊结构的纳米材料 。 The disadvantages of ULS 400 electron beam evaporation(EBE)system limit its further applications,especially in the productions of desirable nanostructures In order to solve these problems,we designed and installed a constant temperature controller With this peculiar controller,EBE can be applied specially in synthesizing desirable nanomaterials We opened up a new route to large-scale production of high-quality nanomaterals in ultrahigh vacuum The works indicate new applications of EBE in nanotechnology
出处 《现代仪器》 2004年第5期39-40,38,共3页 Modern Instruments
基金 国家科技部"973"项目 ( 2 0 0 1CB610 5 )
关键词 超高真空 纳米科技 纳米材料 纳米线 恒温控制系统 电子束蒸发 制备 单晶硅 高品质 Ultrahigh vacuum system Electron beam evaporation Constant temperature controlle~nanotechnology
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参考文献18

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