摘要
介绍了一种应用激光双焦干涉原理测量大口径超光滑表面粗糙度的检测系统。该系统采用共路干涉和电子共模抑制技术,减小了测试环境的影响,消除了激光光强波动引起的系统误差。同时,采用紧凑的光学干涉头移动的扫描方式,因此能够测量大口径光学元件。系统的横向分辨力为0.5μm,纵向分辨力为0.1nm,系统的重复性优于2%。
The described optical system,which is used to measure the roughness of ultra smooth surface,forms a common-path interference,so a nondestructive detection can be carried out by it without standard reference plane.In consequence of the way that the optical interference sensor is moved rather than the specimen while measuring,the system can be used to measure the optical component in great dimension.The lateral resolution of measurement system is 0.5μm,and the vertical one is 0.1nm.The repeatability of the system is better than 2%.
出处
《光学仪器》
2004年第5期7-10,共4页
Optical Instruments
