摘要
光学薄膜的厚度对光学元件的性能有决定性的影响,因此精确控制膜厚就成为了关键。分析了石英晶体监控法,介绍了IC/5镀膜自动控制仪。利用IC/5镀膜自动控制仪在现有镀膜机组上镀制出了高性能的高反膜。实验表明所镀膜层的光机性能优异,在光通信和激光器领域具有广阔的应用前景。
Because the capacity of the optical component lies crucially on the thin film thickness, monitoring the deposition thickness becomes the key to the precise production. In this paper, the method of the quartz crystal monitor are analyzed, and the IC/5 deposition controller is introduced. The IC/5 deposition controller is applied in the existing coating system, and the high precise high-reflective film is made. A series of measurements show that the optical performance and coating quality have been drastically improved and will be widely used in the optical communication and the laser industries.
出处
《光学仪器》
2004年第5期44-47,共4页
Optical Instruments
