摘要
表面粗糙度是机械加工中描述表面微观形貌非常重要的一个参数,表面粗糙度测量技术是现代精密测试计量技术的一个重要组成部分。综述了接触式和非接触式两类测量方法,着重介绍了非接触式测量中的几种测量方法的测量原理及其优缺点。
Surface roughness is an important parameter to reflect the micro-geometry in machine process, and also an important part of modern precise measurement technique. Contact measurement and noncontact measurement was summarized in this paper, and the advantages and disadvantages are disucssed. Some ideas about it's trend are given in the end.
出处
《光学仪器》
2004年第5期54-58,共5页
Optical Instruments
