摘要
针对复合钝化膜刻蚀均匀性差的问题,提出改进光刻工艺,通过温度控制提高复合钝化膜刻蚀均匀性的方法。
The paper was focus on the phenomena of unhomogeneity of complex passive film's etching. We brought forward a method to improve uniformity of ething by means of temperature-controlling.
出处
《林业机械与木工设备》
北大核心
2004年第11期45-46,共2页
Forestry Machinery & Woodworking Equipment
