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电讯系统中硅微机械谐振器/滤波器通带灵敏度分析 被引量：2

Pass-Band Sensitivity Analysis of MEMS Resonators/Filters for Telecommunication
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摘要 以静电梳驱动折叠梁硅微机械谐振器为研究对象 ,在建立硅微机械谐振器振动方程的基础上 ,导出了幅频函数、相频函数对固有频率相对误差、品质因数相对误差的灵敏度表达式 ,重点分析了固有频率相对误差、品质因数相对误差在中心频率处、3d B截止频率处对幅频特性、相频特性的影响 ,以及对常用的 3d B通带带宽的影响 ,得出了一些重要的结论。 The pass-band sensitivity of MEMS resonators/filters is analyzed. The magnitude and phase sensitivity functions to quality factor error and natural frequency error are derived. The magnitude and phase sensitivity values at the centre frequency and two 3 dB bandwidth cutoff frequency are evaluated particularly. Based on the analysis, some important results are presented and a sensitivity analysis example is given for these result validation.
作者 李普 方玉明
机构地区 东南大学机械工程系 东南大学电子工程系教育部MEMS重点实验室 南京邮电学院信息工程系南京
出处 《振动工程学报》 EI CSCD 北大核心 2004年第3期359-364,共6页 Journal of Vibration Engineering
基金 国家自然科学基金资助项目 (编号 :5 0 30 5 0 0 2 ) 江苏省高校自然科学研究计划资助项目 (编号 :0 3KJB5 10 0 89)
关键词 MEMS 谐振器 滤波器 灵敏度 Bandpass filters Bandwidth Resonators Signal processing Telecommunication
分类号 TN713 [电子电信—电路与系统]
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参考文献9

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同被引文献40

  • 1钟莹,张国雄,李醒飞.新型谐振式硅微机械加速度计[J].纳米技术与精密工程,2003,1(1):34-37. 被引量：7
  • 2WANG K, WONG A C, NGUYEN C T C. VHF free-free beam high-Q micromechanical resonators [J]. J Microelectromech Syst, 2000, 9(3): 347-360.
  • 3LI S S, LIN Y W, REN Z Y, et al. An MSI micromechanical differential disk-Array filter [C]//The 14th International Conference on Solid-State Sensors and Actuators. Lyon, France: IEEE, 2007:307-311.
  • 4NGUYEN C T C. MEMS technology for timing and frequency control [J]. IEEE Trans Ultrason Ferroelectr Freq Control, 2007, 54(2): 251-270.
  • 5WANG J, YANG L, PIETRANGELO S B, et al. RF MEMS resonators: getting the right frequency and Q [C]//IEEE Compound Semiconductor Integrated Circuit Symposium 2007 (CSIC 2007). Portland, USA: IEEE, 2007: 1-4.
  • 6IKOMA K, ESAHI M O M. Wine-glass mode micro-mechanical resonator [C]// 5th IEEE Conference on Sensors. Daegu, Korea: IEEE, 2006: 1289-1292.
  • 7SHALABY M M, ABDELMONEUM M A, SAITOU K. Design of spring coupling for high-Q high-frequency MEMS filters for wireless applications[J]. IEEE Trans Ind Electron, 2009, 56(4): 1022-1030.
  • 8WANG J, REN Z, NGUYEN C T C. 1.156-GHz self-aligned vibrating mieromeehanieal disk resonator [J]. IEEE Trans Ultrason Ferroelectr Freq Control, 2004, 51(12): 1607-1628.
  • 9MOHAMED A, DEMIRCI M U, NGUYEN C T C. Stemless wine-glass-mode disk micromechanieal resonators [C]// The t6th Conference on Micro Electro Mechanical Systems. Kyoto, Japan: IEEE, 2003: 698-701.
  • 10BAGHELANI M, GHAVIFEKR H. A new high reliable structure of micro-electro-mechanical radial contour mode disk resonators for UHF application [C]// 18th Conference on Electrical Engineering. Isfahan, lran: Isfahan University of Technology, 2010: 1-4.

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振动工程学报
2004年 第3期

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