碳纳米管场发射显示屏栅极工艺的研究

Grid fabrication process of field emission panel with carbon nanotubes emitters

利用优质云母板作为栅极结构基底材料,结合简单的丝网印刷工艺将导电银浆制作成条状栅极,制作了新型的栅极结构;采用高温分解方法制备了碳纳米管薄膜阴极,制作了三极结构碳纳米管阴极平板显示屏样品。该样品具有良好的场致发射特性以及栅极控制能力。利用这种新型的栅极结构,能够克服整体器件高温封装所带来的技术困难,避免碳纳米管阴极和阳极荧光粉的损伤,实现了稳定可靠的高温封装,具备了制作大面积场致发射器件的潜力。

Using the high-quality mica plate as substrate materials, a new gate electrode structure was fabricated successfully with silver slurry and simple screen-printing process. The carbon nanotubes (CNT) cathode was prepared by pyrolysis process. The triode flat field emission display sample with carbon nanotubes emitters was fabricated successfully, which showed better field emission properties and better gate-electrode control ability. The reliable vacuum encapsulation was realized with the gate-electrode structure, which overcome successfully technical difficulty in the encapsulation process of triode field emission display and avoided the damaging of phosphors powder film and carbon nanotubes materials. The technologies possessed the fabrication potential of large-area field emission display.