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铁电薄膜应用研究进展 被引量：1

Development in Application of Ferroelectric Thin Films
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摘要 简要综述了铁电薄膜在铁电存储器、MEMS系统、微波器件、光电器件等几个方面的典型应用,并对国内铁电薄膜的研究及发展作了概述。 This paper briefly reviews the typical application of ferroelectric thin films in the domains of ferroelectric memory, MEMS, microwave devices and optical devices. Besides, it briefly discusses the research and development of the ferroelectric thin films in China.
作者 徐文彬 王德苗 董树荣
机构地区 浙江大学信息与电子工程学系
出处 《材料导报》 EI CAS CSCD 2004年第10期73-75,84,共4页 Materials Reports
基金 国家自然科学基金(50172042)
关键词 铁电薄膜 微波器件 光电器件 MEMS 典型应用 铁电存储器 系统 国内 ferroelectric thin films ferroelectric memory devices MEMS
分类号 TB383 [一般工业技术—材料科学与工程] TN304 [电子电信—物理电子学]
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参考文献21

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同被引文献21

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材料导报
2004年 第10期

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