厚膜光学参数的椭偏消光法测量

ELLIPSOMETRY AND CACULATION ON OPTICAL PARAMETERS FOR THICK-FILM

讨论了三相椭偏方程对于解算膜厚大于一个周期的介质薄膜（厚膜）光学参数的原理和方法；给出了在ＷＪＺ型多功能激光椭偏仪上进行的测量实例及计算结果．

The princeple and methods to compute optical paramenters, for medium filmwith thickness greater than one cycle, by a three-phase elliptical polarization equation are discussed, and several examples measured by Model-WJZ Multifunctional Laser ellipsometer andcomputing results are given in this paper.