平面波导微型光谱仪系统芯片中Taper耦合结构的研究

Research on Taper structure in planar waveguide micro-spectrometer system chip

设计了一种专用于平面波导微型光谱仪的Taper耦合器。推导了基于三维有限差分光束传播法的标量方程,并利用光束传播法和透明边界条件对耦合器的耦合效率进行了模拟计算和分析。结果表明,Taper耦合器结构稳定,耦合效率高,可满足微型光谱仪的应用要求。

A Taper coupler specially used in micro-spectrometer is designed,the scalar equation of 3-D finite difference beam propagation method is deduced. Based on FD-BPM and TBC, the coupling efficiency of Taper coupler are calculated and analyzed. The result shows that Taper coupler has the peculiarity of stable structure and high coupling efficiency, which can satisfy the application requirements of micro-spectrometer.