单目显微视觉测头动态测量技术的研究

Study of dynamic measurement technology used monocular micro-vision probe

为了解决现有坐标测量机中的单目显微视觉测头视场小和景深小的缺点,提出了显微视觉测头的动态测量方法。建立了运动模糊图像的复原模型以及序列图像的全景组合模型,并提出了测量系统的自标定方法,标定重复性精度优于0.5nm。实验证明:该系统在以6mm/s的速度扫描测量时,测量重复性精度可达到5μm。

A dynamic measurement technology is designed in order to dispose of imperfection that is small field of view and small depth of field of monocular micro-vision probe. The models of motion restore of blur images and panoramic mosaics of sequence images are built, and the self-calibration method of system is brought up, whose uncertainty overmatches 1.1nm. The experiments demonstrated that the measurement uncertainty of the system is 5μm while the system moves with velocity of 6mm/s.