摘要
本文分析了不同基板温度下在单晶硅衬底上沉积的金刚石薄膜的激光拉曼光谱特征。根据这些拉曼光谱的特点,讨论了金刚石膜中存在的几种缺陷,如内应力、SP^2态碳等。此外,对金刚石膜作光荧光分析表明,金刚石膜还存在点缺陷,如中性空缺,其零声子线(ZPL)位于1.677eV处。
The Laser Raman spectra characteristics of diamond thin film deposited on sili-con substrate at 800℃～900℃ are analysed. The defects in diamond thin film, such as stress andSP^2 carbon cluster ate discussed from Laser Raman spectra analysis results. Further photolumincespectrum result of diamond thin film obtained at 840℃ showed that there is other defects such asneutral vacancy in diamond film, the ZPL of this neutral vacancy centered at 13530cm^(-1) or1. 677eV.
关键词
金刚石膜
激光拉曼光谱
晶格缺陷
diamond thin film
laser Raman spectrum
lattice defects
