摘要
作者考察了基体离子注氮预处理对等离子体增强化学气相沉积(PECVD)TiN镀层结合强度及耐磨性的影响。结果表明,基体经离子注氮预处理的PECVD TiN镀层之结合强度比基体未经离子注氮预处理的高,油润滑条件下的耐磨寿命也比后者的长,干摩擦条件下的耐磨性更比后者的好。X-射线衍射及电子探针分析发现,基体经离子注氮预处理后镀层的TiN(200)峰宽化,镀层与基体的界面变宽。
The effect of substrate surface pretreatment by nitrogen implantation on the adhesive strength and antiwear properties of plasma enhanced chemical vapour deposition (PECVD) TiN coatings was studied. The results showed that, the adhesive strength of PECVD TiN coatings on treated substrate increases and the wear life is more longer than that of the coatings on untreated substrate under oil lubrication ,its service life prolongs by about 10 times under dry friction as the substrate treated by nitrogen implantation. The results of X-ray diffraction (XRD) and electron probe microanalyser (EPMA) analysis showed that, after treating with nitrogen implantation, the TiN(200)peak of the coatings and the interface between the coatings and substrate become wider.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
1993年第2期137-144,共8页
Tribology
基金
西安交通大学金属材料强度开放研究实验室资助课题
关键词
离子注氮
预处理
耐磨性
TIN镀层
nitrogen implantation , substrate pretreatment, TiN coatings, adhesive strength, anti-wear properties
