MOCVD法制备Fe/Mo功能梯度材料

The Preparation of Fe/Mo Functional Gradient Materials by MOCVD

利用金属有机化学气相沉积(MOCVD)方法,以Mo(CO)6,Fe(CO)5为物源,在Al2O3陶瓷基片上制备了 Fe/Mo功能梯度材料,并用XPS,XRD,SEM和台阶仪等技术对其成分分布、物相组成、表面形貌和厚度进行测试 和表征.结果表明:材料的组成沿厚度方向呈连续梯度变化,符合功能梯度材料的变化规律.

The Fe/Mo Functional Gradient Materials have been developed on the ceramic substrates of Al_2O_3 using metal organic chemical vapour deposition(MOCVD) with Mo(CO)_6, Fe(CO)_5 source. The distribution of component, composition surface configuration and depth are measured by XPS, XRD, SEM and α-200 step instrument. The result shows that the materials described in the paper conforms to the law of the gradient materials.