大面积取向生长碳纳米管的ECR-CVD方法制备与表征

Synthesis and Characterization of Large Area Well-Aligned Carbon Nanotubes by Electron Cyclotron Resonance Chemical Vapor Deposition (ECR-CVD)

本文采用电子回旋共振微波等离子体化学气相沉积方法 (ECR -CVD) ,以CH4和H2 为气源、Fe3 O4纳米粒子为催化剂 ,未加电场 ,在多孔硅基底上制备出大面积取向生长碳纳米管。使用扫描电子显微镜 (SEM)、透射电子显微镜 (TEM)、X射线衍射 (XRD)、X射线能量色散分析 (EDX)对样品形貌和结构进行表征。结果显示 :合成的碳纳米管为多壁碳管 ;碳纳米管直径 6 0nm～ 90nm ,长度约 8μm ;碳纳米管展现出中空管状和链状两种结构 ;碳纳米管的生长采取催化剂底端生长模式。

The large area,well-aligned carbon nanotube (CNT) arrays were synthesized on porous silicon by electron cyclotron resonance chemical vapor deposition (ECR-CVD) with CH 4 and H 2 as the source gases,Fe 3O 4 nanoparticle as the catalyst and without applying electrical field.Scanning electron microscopy (SEM),transmission electron microscopy (TEM),X-ray diffraction spectroscopy (XRD) and energy dispersive X-ray analysis (EDX) were used to evaluate the structure and composition.The results showed that the CNTs have outer diameters of about 60 nm～90 nm and a length of 8 μm,showing straight tubular and chain structures.