摘要
利用 CW-CO_2激光驱动气相化学反应的方法,以 SiH_4和 C_2H_4作为原料气体合成了 SiC 超细粉末。本工艺方法的特点是反应器壁是冷的,无潜在的污染源,不存在热表面;反应体积小,以保持陡的温度梯度;反应气体直接吸收激光辐射而反应,容易得到高温;反应区的条件容易控制。另外,通过控制反应条件,能够有效地控制 SiC 超细粉末的纯度和粒度。
By using CW-CO_2 laser-driven gas-phase reaction process ultrafine SiC powder has been produced from SiH_4 and C_2H_4.The advantages of this process are:(1)the chamber wall is cold,with no latent pollution;(2)due to the inexistence of hot surfaces,the reaction volume is very small and a ()eep temperature gradient can be maintained;(3)the reactant gases absorb laser radiation directly so that high temperature can be reached easily;and(4)the reaction parameters can be easily con- trolled.The purity and particle size of SiC ultrafine powder have been effectively controlled by choos- ing the optimum process parameters.
关键词
碳化硅
激光
超细粉末
气相合成
silicon carbide
laser
ultrafine powder
gas-phase reaction.
