新型传感器——声表面波位移传感器和声表面波加速度计

NEW TYPE OF TRANSDUCER SAW DISPLACEMENT AND SAW ACCELEROMETERS

本文讨论了用声表面波(SAW)位移传感器进行微小位移测量的两种方法:一种是用两个石英基片来组成 SAW 延迟线振荡器进行位移测量;另一种是利用一个石英基片来组成 SAW 谐振器(SAWR)或延迟线振荡器来实现位移测量。这两种方法对于精密工业的位移测量及其可以转化为位移测量的其它物理参量的测量都是十分有用的。本文还介绍了两大类型的 SAW 加速度计:一种是以伸张应力效力为基础的 SAW加速度计,它的敏感元件发生的是伸张或压缩变形;另一种是以弯曲应力效应为基础的SAW加速度计,它的敏感元件发生的是弯曲变形。另外,本文还对 SAW 加速度计的性能进行了分析、讨论。

This paper discusses two methods of small displacementmeasurement by SAW displacement transducer.Amethodis to use SAWdelay line oscillator that consists of two quartz substrate,the othermethod is to use SAWR or SAW delay line oscillator that consists ofone quartz substrate.These methods are extremely useful for displace-ment measurement of precision industry and the other physical para-meters measurement that may change into displacement measurement. The paper also introduces two type of SAW accelerometers.Oneisbased on tensile-stress effect,its sensitive element occures tension orcompression.The other oneis based on flexure-stress effect,its sensitiveelement occures flexidn.In addition,the paper also analyzes and dis-cusses the performances of SAW accelerometers.