光纤微机电压力传感器的设计

The Design of Optical MEMS Pressure Sensor

设计了一种基于微机电系统 (MEMS)的光纤压力传感器 ,证明了光纤MEMS压力传感器在工作状态下可以由法布里珀罗腔的理论模型进行解释 .推导出光纤MEMS压力传感器中硅横膈膜受到的压力与干涉光强的关系表达式 .并且对光纤MEMS压力传感器的模型进行数值模拟 ,得到了传感器制作过程中涉及到的各个物理量的取值 ,其中腔体半径为 3 0 0 μm、腔体深度为 2 .42 μm、硅横膈膜厚度为 2 3 μm .该设计为光纤MEMS压力传感器的加工和制作提供了理论基础 .

In this paper, the relation expression between pressure and interference light intensity is illustrated in MEMS pressure sensor, with MEMS pressure sensor explained by adopting Fabry-Perot cavity theory model. Every parameter have been ascertained, which will be dealt with during sensor fabrication through numerical simulation. For example, the radius of cavity is 300?μm、the deepness of cavity is 2.42?μm, the diaphragm thickness is 23?μm. The design presented in the paper has laid the theoretical basis for processing and making MEMS pressure sensor.