摘要
介绍了数字刀口检测原理,建立了检测装置,编制了运算软件,对φ125～150mm口径的球面镜进行检测,获得了面形分布.通过与干涉仪测量结果相比较,验证了数字刀口检测方法的可行性,为镜面误差的加工修正提供了依据.
This paper introduces the principle of digital knife-edge testing, experimental instruments and programs. The surface characteristics of φ125mm~φ150mm spherical mirrors are obtained. Comparing with the testing results of interferometer, the digital knife-edge testing technology is available and can provide theoretical basis for surface modification.
出处
《光学与光电技术》
2004年第6期10-13,共4页
Optics & Optoelectronic Technology
关键词
光学面形检测
数字刀口
定量分析
surface characterization test
digital knife-edge
quantitative analysis
