用多齿分度台标定激光小角度干涉仪

Calibration of Small-angle Laser Interferometer by Means of Multi-teeth Table

提出一种用多齿分度台发生标准角直接标定激光小角度干涉仪的新方法。这种方法缩短了溯源链,显著改善了不确定度。同时还提出正反测角差调整小角度干涉仪初始零位,从而现实可行地实现了初始零位的精确调整。用上述方法标定中国计量科学研究院新研制的激光小角度干涉仪,标定不确定度达到0 03″(k=2)。

A technique for calibrating the small-angle laser interferometer using a multi-teeth table to produce standard angles is reported. This new technique has shortened the tracing chain of the calibration and improved the uncertainty significantly. At the same time a new approach for adjusting the zero-angle position of the small angle interferometer is demonstrated to realize this adjustment in practice for the first time. By means of the new technique the small-angle interferometer as the primary standard in the Natl. Inst. of Metrology had been calibrated with an uncertainty of 0.03 arcsecond (k = 2).