摘要
传统的统计过程控制方法不能完全适应半导体制造业生产形式需要。本文在分析半导体光电封装制造模式的特点和实施过程控制所面临的问题的基础上,提出一种基于聚类分析的统计质量控制方法。通过实证分析,证实了该方法的可操作性并取得了良好的实际效果。
Precise control of statistical processes is increasingly important in today's semiconductor manufacturing industry. This paper proposes a methodology for the simulation of Cluster Analysis and Shewhart control charts. The method is applied in a real environment and its capabilities are validated.
出处
《工业工程》
2004年第6期58-61,共4页
Industrial Engineering Journal
关键词
半导体制造业
统计过程
聚类分析
休哈特控制图
statistical process control (SPC)
cluster analysis
Shewhart control chart
analysis of variance (ANOVA)
semiconductor manufacturing
