摘要
简述了曝光的历史和发展趋势及当前的技术状态和技术难点,指出了将来的发展思路。
This article briefly describes history, trend, current technology conditions and difficulties. And development thought in the future is also pointed.
出处
《电子工业专用设备》
2004年第12期66-68,共3页
Equipment for Electronic Products Manufacturing
