PZT悬臂梁结构的优化设计

Study for Optimizing the Structure of PZT Cantilever

推导了单层锆钛酸铅悬臂梁伸缩振动时振幅的表达式 ,得出振幅与电势差ΔV成正比 ,与长厚比L/d成正比 ,与宽度w无关。分类分析了锆钛酸铅悬臂梁弯曲振动的各种模式 ,通过有限元分析软件ANSYS仿真得出 :在相同几何尺寸、相同电压的情况下 ,“异P同E”的振幅是“异E同P”的振幅的一半 ,两者的振幅与电势差ΔV成正比 ,与长厚比 (L/d)成平方关系 ,与宽度w无关。对于“同P同E”得出上下两层锆钛酸铅的电场差异越大 ,振幅越大。此分析方法和结论可用于锆钛酸铅悬臂梁结构的优化设计。

The expression for the amplitude of monolayer PZT cantilever in LE (Length Expansion) mode is derived. It shows that the amplitude is directly proportional to the electric potential difference, Δ V ,and the ratio of the length to the thickness, L/d , and has no relation with the width. Some modes of the flexural vibratino are analyzed by applying commercial finite element analysis package ANSYS. The results indicate that the amplitude of the “hetero- P homo- E ” is half of that of the “hetero- E homo- P ” at the same size and same voltage. The amplitudes of the two modes are proportional to the electric potential difference, Δ V , and the square of the ratio of the length to the thickness, L/d , and have no relation with the width. In the “homo- E homo- P ” mode, the result indicates that the more difference between the electric fields of the two layers, the larger the amplitude. Above-mentioned methods and conclusion can be used for optimized design of PZT cantilever structure.