磁性微电子机械系统(MMEMS)的应用

The Applications of Magnetic Micro-electro-mechanical-system(MMEMS)

微电子机械系统(MEMS)技术结合磁性材料的特性,会产生许多新的功能,并在很多领域得到应用,如信息技术、汽车工业、生物医学、航空以及科学仪器等。本文阐述了在微米尺寸下,磁性MEMS相对于静电和压电执行器,在强度、偏振、执行距离等方面具有的优势,并就磁性MEMS现有及潜在的应用加以概述。

MEMS incorporated with magnetic materials as the sensing or active element may offer new functions and open new markets in the information technology, automotive, biomedical, aerospace and instrumentation. At the micrometer scale magnetic MEMS offer distinct advantages over the electrostatic and piezoelectric actuators in strength, polarity and distance of actuation. In this article, we will present some of the existing and future applications.