固浸透镜技术的研究与最新进展

New Progress in the Research of the Solid Immersion Lens Technique

固浸透镜技术自1990年提出以来,不断地发展趋于成熟。现主要介绍固浸透镜技术的基本原理和近年来固浸透镜技术在各个领域的研究成果以及最新的进展情况。总结了该技术在近场光学存储、半导体纳米结构研究、固浸显微镜等领域内的应用。未来固浸透镜技术具有极好的应用前景。

The solid immersion lens technique has been rapidly developed since it is reported in 1990. The basic principle, research results in a lot of fields and the latest development of solid immersion lens technique are introduced. The applications of the solid immersion lens such as near-field optical data storage, semiconductor nanostructures, solid immersion microscope and so on have been summarized. In the future the solid immersion lens technique will be excellent application prospect.