显微栅线投影法用于微镜转角测量

The Measurement of Rotation Angle of Micro-mirror Using Fringe Projection

采用显微栅线投影法结合相移技术测量了微镜在不同驱动电压下的转角,并同理论值进行了比较,平均误差为4.5%,结果表明测量值和理论值比较吻合.

The fringe projection method is adopted to measure the rotation angle of the micro mirror which is driven by pull in voltage, and the measurement results are compared with the results obtained by theoretical analysis. It is shown that the experimental results are in good agreement with the theoretical analysis.