液态金属离子源发射尖的制备工艺与技术

Fabrication Techniques and Technology for Emit Needle of LMIS

发射尖是液态金属离子源(LMIS)的关键部件之一,其性能的优劣直接影响到整个离子源的工作稳定性。通过对系统软件和硬件的设计,开发了一套发射尖自动腐蚀装置,该装置可以对发射尖腐蚀过程中的速度和深度以及腐蚀电压进行控制,实现发射尖腐蚀工艺的重复性、可靠性,从而为液态金属离子源以及聚焦离子束系统的研制、开发提供了一个有效的辅助工具。

Emit needle is the one of the key parts of liquid metal ion source. The working stability of ion source is affected directly by emit needle' character. We developed a set of automatic device for the eroding of emit needle by designing the software and hardware of the system. This device can control speed ,depth and eroding voltage when the emit needle is eroded. Thus, the eroding techniques of emit needle can be repeated and has high reliability.So an effective assistant tool for developing liquid metal ion source and the system of focused ion beam is offered.