摘要
采用组合靶,利用磁控共溅射技术制备了Co1-xPtx∶C复合纳米颗粒薄膜,并从实验和理论上对不同Pt浓度CoPt∶C薄膜的组分、微结构、磁性能、组分和微结构与磁性能之间的关系以及薄膜的应用进行了初步研究。发现CoPt粒子取向和磁性能与CoPt∶C薄膜中的Pt浓度有密切关系,在较高Pt浓度的CoPt∶C薄膜中观察到垂直各向异性现象。通过改变Pt浓度,可以获得粒子粒径小于10nm、矫顽力可控、垂直磁晶各向异性较高的薄膜。晶格结构和晶粒之间的作用力可认为是影响CoPt∶C薄膜磁性能的主要因素。
The nanocomposite CoPt∶C films with various Pt concentrations were fabricated by magnetron cosputtering and subsequent annealing. The composition, the microstructure, the magnetic properties and the relationship between the composition and the later two of these CoPt∶C films were investigated as a function of Pt concentration. We found that orientations of CoPt grain and magnetic properties are related strongly to the Pt concentrations. The CoPt∶C films with high Pt concentrations have perpendicular anisotropy. By changing Pt concentrations, the films with grain size less than 10 nm, adjustable coercivity and strong perpendicular magnetic anisotropy are obtained. The intergranular interactions and the crystal lattice structure are supposed to be the main factors which affect the magnetic properties of CoPt∶C films.
出处
《微细加工技术》
2004年第4期31-35,共5页
Microfabrication Technology
基金
上海市科技基金发展项目(0215nm030)
关键词
CoPt:C薄膜
浓度
磁性能
磁控溅射
CoPt:C films
concentration
magnetic properties
magnetron sputtering
