一种适用于微操作的驱动技术

A kind of driving technique suitable for micro manipulation

随着微机电系统 (MicroElectro -MechanicalSystems ,MEMS)研究的日渐发展 ,灵活、稳定的微操作器作为微机电系统的一项基础研究 ,其重要性也越来越显示出来。从装配的微操作出发 ,介绍了微操作的基本概念 ,对应用于微操作的压电驱动技术的原理、特点、现状及研究热点进行了详尽的阐述 。

Along with the increasing development of the research of Micro Electro-Mechanical System (MEMS), the flexible and stable micromanipulator, to be regarded as one fundamental research, is showing its importance more and more. Start from the micro manipulation of assembling, the fundamental concept of micro manipulation was introduced. A detailed elaboration was carried out on the principle, distinguishing feature, present situation and hot spot of research of piezoelectric technology being applied to micro manipulation, and an exploration was carried out on its corresponding controlling strategy.