新型sol-gel技术制备BST0—3型厚膜

Fabrication of BST Thick Films Using a New Sol-gel Process

采用传统高温固相烧结法合成了Ba0.6Sr0.4TiO3(BST)陶瓷粉,并用高能球磨法将其细化为纳米粉,均匀分散于组分相同的BST溶胶中,形成稳定的厚膜先体溶液,而后用匀胶法制备出厚度约为6.5μm的BST厚膜。XRD测试结果表明,650℃热处理后的厚膜为单一钙钛矿相。SEM观测显示厚膜表面均匀一致,无裂纹出现。800℃热处理后的厚膜在室温、频率1kHz下相对介电常数εr和介质损耗tgδ分别为455、0.036。

Ba0.6Sr0.4TiO3 powders were produced by conventional high temperature solid-state reactions method. Then the powders were ball milled into sizes of nanometer by a higher energy planetary ball mill machine and uniformly dispersed into BST sol-gel matrix whose composition is same as the powders. 6.5 μm thick films were fabricated using a spin-coating method. The XRD analysis indicates that the thick films annealed at 650℃ possess single-phase perovskite type structure. The SEM micrograph shows that the thick films are uniform and crack-free. Dielectric constant εr and dielectric loss tgδ of the thick film annealed at 800℃ are 455, 0.036, respectively.