摘要
采用改进的溶胶-凝胶(sol-gel)工艺配制了(Ba0.65,Sr0.35)TiO3(BST)溶胶.利用旋转涂覆工艺将BST溶胶涂覆在SiO2/Si衬底上,在不同的热处理条件下制备出BST薄膜.XRD分析结果表明:制得的BST薄膜形成了单一钙钛矿结构;AFM测试结果表明,BST薄膜表面平整致密,无裂纹.表面均方根粗糙度为3~6nm,晶粒大小分布均匀,直径约为40~100 nm.随着热处理温度的提高,BST薄膜的晶粒变大,表面粗糙度变大.
Ba0.65,Sr0.35)TiO3(BST) sols were prepared by an improved sol-gel method. Using a spinning-coating process, the BST sols were coated on SiO2/Si substrates and then they were annealed to form crystalline BST thin films at different temperature conditions. XRD analyses show that all the BST films have formed pure cubic perovskite structure; AFM graphs show that BST films are smooth, dense and crack-free microstructure. The Root Mean Square of these films is 3~6 nm and the average grain sizes is 40~100 nm. The RMS and grain size of BST films become larger with higher annealing temperature.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2005年第1期25-28,共4页
Electronic Components And Materials
基金
国家自然科学基金资助项目(10175045)