摘要
文章介绍了第二代集成电路计算机辅助制造 (IC- CAM)系统。该系统在第一代 IC- CAM系统基础上 ,全面改进了操作员子系统、调度员子系统和质检员子系统 ,实现了控制图的自动绘制和判别 ,添加了流水周期控制模块 ;加强了设备管理子系统功能 ,形成了完整的设备运行记录 ,并具有提示定期维护的功能 ;新增了厂务管理子系统 ,实现了厂务环境数据的自动采集。使用该 IC-CAM系统后 。
The second generation of computer aided manufacturing system for integrated circuits is introduced in the paper On the basis of the first generation of IC CAM system, the operator, dispatcher and quality control subsystems are all improved Control charts can be plotted and judged automatically and a cycle time controlling module is added The operating record of every equipment is formed and the preventive maintenance reminder will be given on schedule, which enhances the function of the equipment management subsystem The new system also includes facility management subsystem, in which the environment parameters can be collected and presented The new IC CAM system will help to improve the manufacture efficiency and the quality of products
出处
《微电子学》
CAS
CSCD
北大核心
2002年第4期253-256,共4页
Microelectronics
基金
"九五"国家重点攻关项目 (97- 76 0 - 0 1- 0 2 )
关键词
集成电路
计算机辅助制造
设备管理
流水周期
Integrated circuit
Computer aided manufacturing
Equipment management
Cycle time
