BBO 晶体的化学腐蚀研究

Study of Etching on BBO Crystal

本文报道了 BBO 晶体在有机溶剂、水和酸碱等腐蚀液中的腐蚀实验结果。测量了晶体在不同腐蚀液和温度下的腐蚀速率、并根据 Arrhenius 公式计算了各腐蚀活化能。BBO 晶体抗有机溶剂腐蚀能力最强,碱和水次之,而酸的腐蚀最为强烈。在同一腐蚀剂中,晶体以 Z 面的腐蚀速率最高,而以垂直于 Z 面的柱面腐蚀速率最低。对 BBO 晶体几个主要晶面的腐蚀形貌进行了观察和分析,探讨了晶体的腐蚀机理。

This paper reports the etching experiments of BBO crystal with etchants,such as organic solutions,water,acid and base.The dependence of etchingrates on the temperature in various etchants were investigated and the activationenergies were calculated based on the Arrhenius equation.The organic solutionsare the most etch-proof etchants,then base and water,and acid is the moststrong agent for BBO crystal.In same-kind of etchants,the etching rate on theZ plane is higher than those on the prisms normal to the Z plane.The etchedmorphology on the main planes of BBO crystal is observed and the mechanismof etching is proposed.