摘要
对Φ1mm和Φ2mm电磁型微马达的原理、结构进行了详细介绍。利用微马达可以作为同步电机使用的特性实现微马达的快速运转 ,同时利用其步进特性实现单步进给。为了实现微马达在精密MEMS系统中的应用 ,采用了一种简单、实用的方式来实现微马达的步距细分。该马达良好的性能和完善的控制方式提高了其实用能力。
The principle and structure of the electromagnetic micromotor are introduced,the diameters of those motors are Φ1 mm and Φ2 mm.The motor can be used as synchronous motor that can get a fast velocity; at the same time, it can also be used as a step motor to realize single step movement. In order to apply it in MEMS system, a simple but effective method is used to realize the subdivision of a step angle. Its good performance and perfectly control method improve its capability in real time use.
出处
《测控技术》
CSCD
2000年第12期5-7,共3页
Measurement & Control Technology
