常压介质阻挡放电等离子体发射光谱诊断及其在材料表面改性中的应用

Spectral Diagnosis of Dielectric Barrier Plasma Discharge at Atmospheric Pressure and Its Application to Surface Modification of Materials

使用介质阻挡放电光谱诊断装置,分析了常压等离子体放电电流与放电间隙的变化关系,提出了“放电临界间隙”的概念,记录和比较了空气和氩气常压介质阻挡放电等离子体发射光谱,并运用同一元素谱线的相对强度来诊断电子温度等物理参量,以达到对材料表面改性过程的实时监控。工作的结果对常压介质阻挡放电及其在材料改性中的应用具有重要的意义。

The spectral lines of air and argon plasma emission at atmospheric pressure were recorded and analyzed. Plasma parameters such as discharge current, discharge gap and electron temperature were measured. The purpose of the study is to control the process of materials' surface modification promptly. The experimental results indicate that a critical discharge gap is an important parameter to improve the quality of materials' surface modification, and spectral diagnosis has been proved to be a workable method by choosing a suitable discharge gap.