自蔓延高温合成氮化硅的研究

STUDY ON SELF-PROPAGATION HIGH TEMPERATURE SYNTHESIS OF SILICON NITRIDE

本文在106炉生产规模氮化硅的合成试验中,通过对高压釜内氮气温度与压力的变化计算出在合成过程中耗氮量的变化,计算结果表明,氮化硅燃烧合成的特点属自蔓延高温合成中非稳态合成。其燃烧模式为振荡燃烧及螺旋燃烧。此外,氮气渗透率与高压釜内氮压及氮气渗透阻力有关。

The self-propagating high temperature synthesis of silicon nitride was studied.Based on the change of temperature and pressure in high pressure system,the volume of absorbed nitrogen was calculated for 106 commercial batches.It was found that the combustion synthesis is characterized by a nonsteady combustion mode,which leads to oscillatory and spin motion.In oscillatory motion the reaction proceeds at variable velocity.Moreover,the absorbed nitrogen is increased with nitrogen pressure and nitrogen permeability depends on the nitrogen pressure and resistance to permeation.