三自由度微定位工作台的设计与特性分析

Design and analysis of a 3-D of micropositioning workpiece table

设计一种用于平面磨削主动控制的新型数控微定位工作台。该工作台采用三个安装在底座上的压电陶瓷 (PZT)驱动器驱动动平台 ,三个圆形凹槽弹性铰链构成的弹性环节实现对压电陶瓷驱动器的预紧。为了提高定位精度采用三个高精度的电容式位移传感器用来测量动平台的输出 ,从而形成闭环控制系统。采用有限元分析软件ANSYS对微定位工作台的静、动态特性进行了数值分析。

In order to achieve active grinding control,a novel numerical control micropositioning workpiece table has been developed.Three piezoelectric actuators mounted on the base drive the table.An elastic structure with three circular-notch flexure hinges is designed to apply preload to the piezoelectric actuators.Three capacitive sensors are used to form close loop control system.The finite element method has been carried out to verify the performance of the workpiece table and the established models of the micropositioning workpiece table.