超声波电动机驱动大行程柔性导轨设计

Design of large displacement stage

应用叠片式柔性铰链和压电陶瓷电动机 ,实现了一种大行程柔性导轨可以在保持柔性铰链高直线度的前提下 ,大幅度提高行程 ,同时还保持柔性铰链微位移工作台无机械爬行现象的优点。导轨应用超声波电动机作为叠片式柔性铰链工作台的驱动器 ,驱动分辩率可达 2 0nm。

A laminated flexure hinge stage and a ultrasonic motor is applied to design a large displacement stage,it could improve the displacement greatly while keep the advantage of high linearity,meanwhile,it could keep the advantage of flexure hinge of no mechanical creep.A ultrasonic motor is used as the driver of the laminated flexure hinge stage.The resolution of the stage could reach 20nm.