不同材料的准分子激光微细加工机制

Micro-Fabrication Mechanism of Excimer Laser on Various Materials

采用准分子激光加工方法,在相同的工艺参数下加工了Al2O3陶瓷、不锈钢、Q235等脆性和塑性材料。通过扫描电子显微镜(SEM)获得加工表面微观形貌图像和采用表面轮廓仪测得形貌统计参数。分析得出,准分子激光的加工机理是光化学和热效应作用等多种因素影响的综合体现;加工不同材质的材料时,准分子激光具有不同的加工机制,对于脆性材料以光解剥离(APD)为主,而对于塑性材料则以热效应为主。

Excimer laser is used to process brittle and plastic materials such as Al 2 O 3 ceramic, stainless steel and Q235, etc. with the same technological parameters. Surface micro topography photos are obtained by scanning electron microscope(SEM), and statistic parameters of topography are measured by surface profile instrument. It is concluded that the processing mechanism of excimer laser is the synthetic expression of multi influencing factors such as photochemistry and thermal effect, and the processing mechanism is different from excimer laser for processing different materials. For example, the brittle materials are mainly by ablative photo decompositon (APD) and the plastic materials by thermal effect.